Product

NEMST-Jet2008I系列

Atmospheric Plasma Cleaner_Arc Jet Type (Single Point)

Atmospheric Plasma Cleaner_Arc Jet Type (Single Point)
Atmospheric Plasma Cleaner_Arc Jet Type (Single Point)
  • Arc Jet plasma design.
  • Multiple reaction gases can be used
  • Excellent cleaning effect with concentrated plasma energy.
  • Fast treatment speed.
  • Gap between nozzle and substrate can be larger.
  • Can be standalone machine or module intregrated with in-line mechanism.
  • Indirect/Remote plasma design.
  • Can be suitable for different kinds of materials with various shapes.
  • Reaction gas: CDA and etc.
  • Low reaction gas consumption and running cost.
  • Effective Range: Φ 10 mm or smaller.
  • Treatment Speed: 50 mm/sec~300 mm/sec.
  • Gap between nozzle and substrate: 5 mm ~ 15 mm.
  • Plasma On Stabilizing Time: < 0.5 sec.
  • High plasma stability.
  • Indirect/Remote Plasma with no ESD.
  • Can be suitable for different kinds of materials with various shapes.
  • a. ITO Lead/Finger Cleaning before COG or COF in LCM applications. b. Surface Cleaning or Surface Modification for Electronics or Non-electronics Devices/Materials. c. Surface Treament before Lamination or Prining Processes. d. Suitable for Front-end and Back-end Processes in LCD or Touch Panel Applications. e. Film Growth Applications.