NEMST-AS2002

Plasma Asher

Plasma Asher
Plasma Asher

Plasma AsherFeaturing Design

  • High treatment uniformity
  • Be able to conduct 6 or 8 inches wafer
  • Up to 25 ~ 50 wafers per load
  • Cycle time about 20 ~ 25 min

Plasma AsherPerformances

  • High Density Plasma System ( ICP)
  • Damage Free Design
  • Electrodes with Water-cooling Mechanism

Plasma AsherApplications/Solutions

  • Widely utilized in the semiconductor and LED industries, this system provides highly efficient removal of various photoresists and offers precision processing for advanced packaging technologies, including FOPLP and FOWLP.